Toh-Ming Lu

Ray Palmer Baker Distinguished Professor, Physics, Applied Physics & Astronomy

Dr. Lu joined RPI in 1982. He served as the Chairman of the Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute from 1992 to 1997. He was the Director of the Semiconductor Research Corporation (SRC), Center for Advanced Interconnect Science and Technologies (CAIST) from 1999 to 2005 where 13 universities, 25 faculty, and more than 40 graduate students are engaged in a nation-wide interdisciplinary research in microelectronics. His honors include the 2004 Materials Research Society Medal Award and the 2005 SRC Faculty Leadership Award. He is Fellow of four major societies: American Physical Society, American Vacuum Society, American Association for the Advancement of Sciences, and the Materials Research Society. Dr. Lu published over 500 papers, 8 books, 12 patents, and graduated 47 Ph.D. students, who have assumed leadership positions in semiconductor companies such as IBM, Intel, AMD, Motorola, Analog, GE, and Chartered Semiconductor.


Ph.D., University of Wisconsin , Madison (Physics, 1976)

Research Focus
  • Thin Film Morphologies
  • 3D Integrated Nano-structure formation