Arjun Saxena

Electrical, Computer, and Systems Engineering

Publications

The following is a selection of recent publications in Scopus. Arjun Saxena has 33 indexed publications in the subjects of Physics and Astronomy, Materials Science, Engineering.

Current status and future directions of ultra large scale integrated circuits and the crucial role of adhesion science and technology
Arjun N. Saxena
First International Congress on Adhesion Science and Technology Invited Papers: Festschrift in Honor of Dr. K.L. Mittal on the Occasion of his 50th Birthday
, 2023
, pp.137-146
.
Invention of integrated circuits: Untold important facts
Arjun N. Saxena
Invention Of Integrated Circuits: Untold Important Facts
, 2009
, pp.1-523
.
Monolithic concept and the inventions of integrated circuits by Kilby and Noyce
Arjun N. Saxena
2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings
, 3
, 2007
, pp.460-473
.
Importance of thermophysical properties of thin films in ultra-large-scale integrated circuits and beyond
A. N. Saxena
International Journal of Thermophysics
, 19
, 1998
, pp.961-967
.
Technology and reliability issues of multilevel interconnects in bipolar, biCMOS and CMOS VLSIC/ULSIC's
Arjun N. Saxena, K. Ramkumar, Sumanta K. Ghosh, Mark A. Bourgeois
Proceedings of the 1993 Bipolar/Bicoms Circuits and Technology
, 1993
, pp.12-19
.
Stress Variations in TEOS-Based SiO<inf>2</inf> Films During Ex-Situ Thermal Cycling
K. Ramkumar, S. K. Ghosh, A. N. Saxena
Journal of the Electrochemical Society
, 140
, 1993
, pp.2669-2673
.
Coupling of an N-well CMOS fabrication laboratory course with the sematech center of excellence in multilevel metallization at Rensselaer
David Price, Ronald Gutmann, J. Haley, Shyam Murarka, Arjun Saxena, Paul Chow, K. RamKumar, S. Lakshminarayanan, Anup Bhalla
1993 University/Government/Industry Microelectronics Symposium
, 1993
, pp.183-185
.
Stress in SiO2 Films Deposited by Plasma and Ozone Tetraethylorthosilicate Chemical Vapor Deposition Processes
K. Ramkumar, A. N. Saxena
Journal of the Electrochemical Society
, 139
, 1992
, pp.1437-1442
.
Aluminum metallization for ULSI
Dipankar Pramanik, Arjun N. Saxena
Solid State Technology
, 33
, 1990
, pp.73-79
.
Low-temperature metal-organic chemical vapor deposition (LTMOCVD) of device-quality copper films for microelectronic applications
Alain E. Kaloyeros, Aiguo Feng, Jonathan Garhart, Kenneth C. Brooks, Sumanta K. Ghosh, Arjun N. Saxena, Fred Luehrs
Journal of Electronic Materials
, 19
, 1990
, pp.271-276
.

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